Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112205 | Substrate processing apparatus and substrate processing method | — | 2018-10-30 |
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Koji Kaneyama | 2018-08-14 |
| 9993840 | Substrate processing apparatus and substrate processing method | — | 2018-06-12 |
| 9956565 | Substrate treating apparatus | — | 2018-05-01 |