Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972516 | Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method | Tadashi Miyagi, Toru Momma | 2018-05-15 |
| 9928970 | Lithium ion capacitor | Takashi Matsuura, Naoki Ohmi, Yukihiro Komatsubara, Sachiko Kubota, Takashi Tamura +1 more | 2018-03-27 |
| 9874289 | Valve main unit and method of manufacturing the same | Kazuhisa Sugiyama, Yutaka Inada, Eiji Okawachi, Akira Yamashita | 2018-01-23 |