Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134582 | Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same | Seung-min Ryu, Takanori Koide, Naoki Yamada, Jae-Soon Lim, Tsubasa Shiratori | 2018-11-20 |
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Sun Hye HWANG, Jung-Sik Choi, Xiaobing Zhou, Brian D. Rekken +2 more | 2018-08-14 |
| 9991112 | Method for forming dielectric film and method for fabricating semiconductor device | Won Woong Chung, Sun Hye HWANG | 2018-06-05 |
| 9941114 | Organometallic precursors and methods of forming thin layers using the same | Youn Soo Kim, Sang Jun Yim, Myong Woon Kim, Sang Ick Lee, Sang-Chul Youn | 2018-04-10 |
| 9923047 | Method for manufacturing a capacitor for semiconductor devices | Se-hoon Oh, Seongyul Park, Chin Moo Cho, Yunjung Choi, Gyu-hee Park +2 more | 2018-03-20 |