Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134582 | Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same | Seung-min Ryu, Naoki Yamada, Jae-Soon Lim, Tsubasa Shiratori, Youn-Joung Cho | 2018-11-20 |