Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155784 | Alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Akio Saito, Tomoharu Yoshino | 2018-12-18 |
| 10134582 | Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same | Seung-min Ryu, Takanori Koide, Naoki Yamada, Jae-Soon Lim, Youn-Joung Cho | 2018-11-20 |
| 9960032 | Methods of forming thin films and methods of fabricating integrated circuit devices using the same | Jae-wan Chang, Youn Soo Kim | 2018-05-01 |
| 9896468 | Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Akio Saito, Tomoharu Yoshino | 2018-02-20 |