Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Youn-Joung Cho, Jung-Sik Choi, Xiaobing Zhou, Brian D. Rekken +2 more | 2018-08-14 |
| 9991112 | Method for forming dielectric film and method for fabricating semiconductor device | Won Woong Chung, Youn-Joung Cho | 2018-06-05 |