Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134583 | Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the same | Sunhye HWANG, Younjoung Cho, Sang Ick Lee, Sang Yong Jeon, In Kyung JUNG +2 more | 2018-11-20 |
| 9941114 | Organometallic precursors and methods of forming thin layers using the same | Youn-Joung Cho, Youn Soo Kim, Sang Jun Yim, Sang Ick Lee, Sang-Chul Youn | 2018-04-10 |
| 9916974 | Amino-silyl amine compound and the manufacturing method of dielectric film containing Si—N bond by using atomic layer deposition | Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Sang Yong Jeon +3 more | 2018-03-13 |