Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura +2 more | 2018-06-12 |
| 9969627 | Liquid treatment apparatus and liquid treatment method | Masaki Fujikane | 2018-05-15 |
| 9928992 | Plasma generation device | Yoshihiro Sakaguchi | 2018-03-27 |