Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |