Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2018-06-12 |
| 9966241 | Sputtering apparatus | — | 2018-05-08 |
| 9952498 | Mask blank, and transfer mask | Toshiyuki Suzuki | 2018-04-24 |