Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Kazuya Konaga, Hiroyuki Toya, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura +2 more | 2018-06-12 |