Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133838 | Guided defect detection of integrated circuits | Jie Lin, Zhaoli Zhang, Zongchang Yu | 2018-11-20 |
| 9940427 | Lens heating aware source mask optimization for advanced lithography | Michael M. Crouse, Youri Johannes Laurentius Maria Van Dommelen, Peng Liu, Aiqin JIANG, Wenjin Huang | 2018-04-10 |
| 9934350 | Pattern selection for full-chip source and mask optimization | — | 2018-04-03 |