Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9940427 | Lens heating aware source mask optimization for advanced lithography | Michael M. Crouse, Youri Johannes Laurentius Maria Van Dommelen, Peng Liu, Hua-Yu Liu, Aiqin JIANG | 2018-04-10 |