Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9952505 | Imprint device and pattern forming method | Yosuke Okamoto, Kazuhiro Segawa, Manabu Takakuwa, Kentaro Kasa | 2018-04-24 |
| 9885960 | Pattern shape adjustment method, pattern shape adjustment system, exposure apparatus, and recording medium | Kazuya Fukuhara, Kazuo Tawarayama | 2018-02-06 |