Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054856 | Exposure method, manufacturing method of device, and thin film sheet | Kentaro Matsunaga | 2018-08-21 |
| 9952505 | Imprint device and pattern forming method | Yosuke Okamoto, Nobuhiro Komine, Manabu Takakuwa, Kentaro Kasa | 2018-04-24 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazuya Fukuhara, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio +4 more | 2018-04-10 |
| 9929103 | Misalignment checking device and manufacturing method of semiconductor device | — | 2018-03-27 |