Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10093044 | Imprinting apparatus and imprinting method | Yoshio MIZUTA, Masato Suzuki | 2018-10-09 |
| 9966284 | Alignment method, pattern formation system, and exposure device | — | 2018-05-08 |
| 9966316 | Deposition supporting system, depositing apparatus and manufacturing method of a semiconductor device | — | 2018-05-08 |
| 9952505 | Imprint device and pattern forming method | Yosuke Okamoto, Nobuhiro Komine, Kazuhiro Segawa, Kentaro Kasa | 2018-04-24 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazuya Fukuhara, Kazutaka Ishigo, Yoshinori Hagio, Kazuhiro Segawa +4 more | 2018-04-10 |