Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10022748 | Stencil mask, stencil mask manufacturing method, and imprinting method | Masato Suzuki, Akiko Mimotogi, Yohko Komatsu, Ryoichi Suzuki | 2018-07-17 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio, Kazuhiro Segawa +4 more | 2018-04-10 |
| 9885960 | Pattern shape adjustment method, pattern shape adjustment system, exposure apparatus, and recording medium | Nobuhiro Komine, Kazuo Tawarayama | 2018-02-06 |