Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885960 | Pattern shape adjustment method, pattern shape adjustment system, exposure apparatus, and recording medium | Nobuhiro Komine, Kazuya Fukuhara | 2018-02-06 |
KT
Kazuo Tawarayama
Overall (2018): #348,235 of 503,207Top 70%
1
Patents 2018