Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2018-10-02 |