Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087520 | Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Dennis Elliott Kamenitsa, Richard J. Rzeszut, Fernando M. Silva | 2018-10-02 |
| 10074508 | Low conductance self-shielding insulator for ion implantation systems | John F. Baggett | 2018-09-11 |
| 9984855 | Implementation of co-gases for germanium and boron ion implants | Tseh-Jen Hsieh | 2018-05-29 |
| 9978555 | Ion source liner having a lip for ion implantation systems | Tseh-Jen Hsieh | 2018-05-22 |
| 9941087 | Ion source cathode shield | Tseh-Jen Hsieh, Paul Silverstein | 2018-04-10 |
| 9870893 | Multi-piece electrode aperture | Tseh-Jen Hsieh, Paul Silverstein | 2018-01-16 |