PS

Paul Silverstein

AT Axcelis Technologies: 2 patents #4 of 21Top 20%
📍 Somerville, MA: #62 of 445 inventorsTop 15%
🗺 Massachusetts: #2,224 of 12,682 inventorsTop 20%
Overall (2018): #113,476 of 503,207Top 25%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9941087 Ion source cathode shield Neil K. Colvin, Tseh-Jen Hsieh 2018-04-10
9870893 Multi-piece electrode aperture Neil K. Colvin, Tseh-Jen Hsieh 2018-01-16