Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984855 | Implementation of co-gases for germanium and boron ion implants | Neil K. Colvin | 2018-05-29 |
| 9978555 | Ion source liner having a lip for ion implantation systems | Neil K. Colvin | 2018-05-22 |
| 9941087 | Ion source cathode shield | Neil K. Colvin, Paul Silverstein | 2018-04-10 |
| 9870893 | Multi-piece electrode aperture | Neil K. Colvin, Paul Silverstein | 2018-01-16 |