Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128084 | Wafer temperature control with consideration to beam power input | Joe Ferrara, Brian Terry | 2018-11-13 |
| 10074508 | Low conductance self-shielding insulator for ion implantation systems | Neil K. Colvin | 2018-09-11 |
| 10041789 | Integrated emissivity sensor alignment characterization | Joseph Ferrara | 2018-08-07 |