Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128084 | Wafer temperature control with consideration to beam power input | John F. Baggett, Brian Terry | 2018-11-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128084 | Wafer temperature control with consideration to beam power input | John F. Baggett, Brian Terry | 2018-11-13 |