FS

Fernando M. Silva

AT Axcelis Technologies: 1 patents #5 of 21Top 25%
🗺 Massachusetts: #4,566 of 12,682 inventorsTop 40%
Overall (2018): #420,860 of 503,207Top 85%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10087520 Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Richard J. Rzeszut, Neil K. Colvin 2018-10-02