Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Alexander Lerner, Khurshed Sorabji, Andreas Hegedus | 2018-09-04 |
| 9982346 | Movable liner assembly for a deposition zone in a CVD reactor | Gregg Higashi, Khurshed Sorabji | 2018-05-29 |
| 9932670 | Method of decontamination of process chamber after in-situ chamber clean | Jie Su, Sandeep Nijhawan, Olga Kryliouk, Jacob Grayson, Sang Won Kang +2 more | 2018-04-03 |