Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932670 | Method of decontamination of process chamber after in-situ chamber clean | Jie Su, Lori D. Washington, Olga Kryliouk, Jacob Grayson, Sang Won Kang +2 more | 2018-04-03 |
SN
Sandeep Nijhawan
Overall (2018): #249,897 of 503,207Top 50%
1
Patents 2018