Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Alexander Lerner, Khurshed Sorabji, Lori D. Washington | 2018-09-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Alexander Lerner, Khurshed Sorabji, Lori D. Washington | 2018-09-04 |