Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10076896 | Pressurized heated rolling press for manufacture and method of use | — | 2018-09-18 |
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Alexander Lerner, Lori D. Washington, Andreas Hegedus | 2018-09-04 |
| 9982346 | Movable liner assembly for a deposition zone in a CVD reactor | Gregg Higashi, Lori D. Washington | 2018-05-29 |
| 9859162 | Perforation of films for separation | Daniel G. Patterson | 2018-01-02 |