Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Alexander Lerner, Khurshed Sorabji, Lori D. Washington, Andreas Hegedus | 2018-09-04 |
| 10008628 | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from template layer and etching | I-Kang Ding, Brendan M. Kayes, Rose TWIST, Sylvia Spruytte, Feng-Ming Liu +2 more | 2018-06-26 |
| 9982346 | Movable liner assembly for a deposition zone in a CVD reactor | Khurshed Sorabji, Lori D. Washington | 2018-05-29 |