Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147613 | Neutral beam etching of Cu-containing layers in an organic compound gas environment | Audunn Ludviksson | 2018-12-04 |
| 10002744 | System and method for controlling plasma density | Peter L. G. Ventzek, Barton Lane | 2018-06-19 |
| 9978568 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Merritt Funk | 2018-05-22 |
| 9966239 | Non-ambipolar plasma enhanced DC/VHF phasor | Zhiying Chen | 2018-05-08 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9941126 | Microwave plasma device | Merritt Funk, Jianping Zhao | 2018-04-10 |
| 9934974 | Microwave plasma device | Jianping Zhao, Merritt Funk | 2018-04-03 |