Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147600 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2018-12-04 |
| 10041166 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2018-08-07 |
| 10014212 | Selective deposition of metallic films | Shang Chen, Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa | 2018-07-03 |
| 9899291 | Method for protecting layer by forming hydrocarbon-based extremely thin film | Richika Kato, Seiji Okuro, Yuya Nonaka, Akinori Nakano | 2018-02-20 |
| 9875893 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2018-01-23 |