Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157733 | Methods for igniting a plasma in a substrate processing chamber | Shouyin Zhang, Fuhong Zhang | 2018-12-18 |
| 10014179 | Methods for forming cobalt-copper selective fill for an interconnect | Rong Tao, Tae Hong Ha, Xianmin Tang | 2018-07-03 |
| 9953813 | Methods and apparatus for improved metal ion filtering | Xianmin Tang, Guojun Liu | 2018-04-24 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Joseph M. Ranish, Xiaoxiong Yuan, Ashish Goel | 2018-02-27 |