Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095123 | Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program | Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Jeroen Johannes Theodorus Hendrikus De Best | 2018-10-09 |
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more | 2018-08-28 |
| 9897926 | Stage positioning system and lithographic apparatus | Wilhelmus Henricus Theodorus Maria Aangenent, Lucas Koorneef, Theo Anjes Maria Ruijl, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen +2 more | 2018-02-20 |