Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Kirk Scott Cuthill, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Anupama Mallikarjunan +1 more | 2018-09-18 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Mark Leonard O'Neill | 2018-05-22 |
| 9905415 | Methods for depositing silicon nitride films | Anupama Mallikarjunan, Xinjian Lei, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |