Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D836572 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Xiaodong Wang | 2018-12-25 |
| 10157733 | Methods for igniting a plasma in a substrate processing chamber | Shouyin Zhang, Joung Joo Lee | 2018-12-18 |
| D825504 | Target profile for a physical vapor deposition chamber target | William Johanson, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller | 2018-08-14 |
| 9991101 | Magnetron assembly for physical vapor deposition chamber | William Johanson, Brij Datta, Adolph Miller Allen, Yu Liu, Prashanth Kothnur | 2018-06-05 |
| 9960024 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Anthony Infante, Zheng Wang | 2018-05-01 |