Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960024 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Fuhong Zhang, Zheng Wang | 2018-05-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960024 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Fuhong Zhang, Zheng Wang | 2018-05-01 |