Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090164 | Hard masks for block patterning | Isabel C. Estrada-Raygoza, Yann Mignot, Indira Seshadri, Yongan Xu | 2018-10-02 |
| 10082736 | Approach to lowering extreme ultraviolet exposure dose for inorganic hardmasks for extreme ultraviolet patterning | Karen E. Petrillo, Indira Seshadri | 2018-09-25 |
| 9941142 | Tunable TiOxNy hardmask for multilayer patterning | Abraham Arceo de la Pena, Nelson Felix, Sivananda K. Kanakasabapathy | 2018-04-10 |