Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082736 | Approach to lowering extreme ultraviolet exposure dose for inorganic hardmasks for extreme ultraviolet patterning | Ekmini Anuja De Silva, Indira Seshadri | 2018-09-25 |
KP
Karen E. Petrillo
Overall (2018): #349,270 of 503,207Top 70%
1
Patents 2018