Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2018-09-11 |
| 9984868 | PEALD of films comprising silicon nitride | Victor Nguyen, Woong Jae Lee, Mihaela Balseanu, Li-Qun Xia | 2018-05-29 |