| 10108093 |
Controlling photo acid diffusion in lithography processes |
Peng Xie, Ludovic Godet |
2018-10-23 |
| 10073350 |
Maskless lithography for web based processing |
— |
2018-09-11 |
| 10014184 |
Methods and apparatus for forming a resist array using chemical mechanical planarization |
— |
2018-07-03 |
| 10014174 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning |
Bencherki Mebarki, Pramit Manna, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim |
2018-07-03 |
| 10012910 |
Pattern generators employing processors to vary delivery dose of writing beams according to photoresist thickness, and associated methods |
— |
2018-07-03 |
| 9927696 |
Method to reduce line waviness |
Joseph R. Johnson, Thomas Laidig |
2018-03-27 |
| 9915621 |
Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof |
Majeed A. Foad, Christopher G. Talbot, John Christopher Moran |
2018-03-13 |
