Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114297 | Active eye-to-eye with alignment by X-Y capacitance measurement | Jeffrey Kaskey | 2018-10-30 |
| 10036966 | Environmental control of systems for photolithography process | Benjamin M. Johnston, John M. White | 2018-07-31 |
| 10037589 | Parallel image processing system | Barry P. Keane | 2018-07-31 |
| 10031427 | Methods and apparatus for vibration damping stage | Benjamin M. Johnston, Jeffrey Kaskey | 2018-07-24 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Jang Fung Chen, John M. White | 2018-03-27 |
| 9927696 | Method to reduce line waviness | Joseph R. Johnson, Christopher Dennis Bencher | 2018-03-27 |
| 9907152 | Illumination system with monitoring optical output power | Jeffrey Kaskey, David A. Markle, Jang Fung Chen | 2018-02-27 |