Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114297 | Active eye-to-eye with alignment by X-Y capacitance measurement | Thomas Laidig | 2018-10-30 |
| 10031427 | Methods and apparatus for vibration damping stage | Benjamin M. Johnston, Thomas Laidig | 2018-07-24 |
| 9907152 | Illumination system with monitoring optical output power | Thomas Laidig, David A. Markle, Jang Fung Chen | 2018-02-27 |