Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153191 | Substrate carrier system and method for using the same | Zuoqian Wang | 2018-12-11 |
| 10126790 | Dual loop susceptor temperature control system | — | 2018-11-13 |
| 10096509 | Substrate carrier system with protective covering | Zuoqian Wang | 2018-10-09 |
| 10036966 | Environmental control of systems for photolithography process | Benjamin M. Johnston, Thomas Laidig | 2018-07-31 |
| 9959961 | Permanent magnetic chuck for OLED mask chucking | Zuoqian Wang | 2018-05-01 |
| 9935183 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Tae Kyung Won, Seon-Mee Cho | 2018-04-03 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Thomas Laidig, Jang Fung Chen | 2018-03-27 |
| 9922854 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, Dong-Kil Yim, Hans Georg Wolf +3 more | 2018-03-20 |