Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865484 | Selective etch using material modification and RF pulsing | Chentsau Ying, Srinivas D. Nemani, Viachslav Babayan, Michael W. Stowell | 2018-01-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865484 | Selective etch using material modification and RF pulsing | Chentsau Ying, Srinivas D. Nemani, Viachslav Babayan, Michael W. Stowell | 2018-01-09 |