Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D836573 | Ring for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2018-12-25 |
| D827592 | Electrode cover for a plasma processing apparatus | Kohei Sato, Kazunori Nakamoto | 2018-09-04 |
| 9887070 | Plasma processing apparatus and plasma processing method | Takao Arase, Masahito Mori, Kenetsu Yokogawa, Yuusuke Takegawa | 2018-02-06 |