Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D836573 | Ring for a plasma processing apparatus | Takamasa Ichino, Kazunori Nakamoto | 2018-12-25 |
| D827592 | Electrode cover for a plasma processing apparatus | Takamasa Ichino, Kazunori Nakamoto | 2018-09-04 |
| D812578 | Upper chamber for a plasma processing apparatus | Takashi Uemura, Susumu Tauchi | 2018-03-13 |