Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D812578 | Upper chamber for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2018-03-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D812578 | Upper chamber for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2018-03-13 |