Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D836573 | Ring for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2018-12-25 |
| 10141165 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Yutaka Ohmoto, Koji Nagai | 2018-11-27 |
| D827592 | Electrode cover for a plasma processing apparatus | Takamasa Ichino, Kohei Sato | 2018-09-04 |