Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141165 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Kazunori Nakamoto, Koji Nagai | 2018-11-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141165 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Kazunori Nakamoto, Koji Nagai | 2018-11-27 |